A Novel Oscillation Controller for Vibrational MEMS Gyroscopes

Lili Dong; Qing Zheng; Zhiqiang Gao

doi:10.1109/ACC.2007.4282883

A Novel Oscillation Controller for Vibrational MEMS Gyroscopes

Lili Dong
, Qing Zheng
, Zhiqiang Gao

IEEE
Cleveland State University

Research output: Contribution to journal › Article › peer-review

Abstract

This paper introduces a novel oscillation controller for the drive axis of a MEMS gyroscope. Assuming the resonant frequencies of the drive and sense axes are matched and no external control input for sense axis, we employ the controller to drive the drive axis to resonance, to regulate the output amplitude of drive axis to a desired value, and to compensate for the mechanical-thermal noise and Quadrature error term. The controller is simply a combination of a traditional PD controller and a linear Extended State Observer (ESO). Since the controller design does not require exact information of system parameters, it is very robust against structural uncertainties of the drive axis. We simulate the controller on a vibrational piezoelectric beam gyroscope. The effectiveness of the controller is verified by the simulation results and performance analysis. © 2007 IEEE.

Original language	American English
Journal	Proceedings of the American Control Conference
DOIs	https://doi.org/10.1109/ACC.2007.4282883
State	Published - Dec 1 2007

Disciplines

Electrical and Computer Engineering

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10.1109/ACC.2007.4282883License: CC BY

https://ieeexplore.ieee.org/document/4282883

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@article{c58e8f6ae5e64a6187abb9dd2822be82,

title = "A Novel Oscillation Controller for Vibrational MEMS Gyroscopes",

abstract = " This paper introduces a novel oscillation controller for the drive axis of a MEMS gyroscope. Assuming the resonant frequencies of the drive and sense axes are matched and no external control input for sense axis, we employ the controller to drive the drive axis to resonance, to regulate the output amplitude of drive axis to a desired value, and to compensate for the mechanical-thermal noise and Quadrature error term. The controller is simply a combination of a traditional PD controller and a linear Extended State Observer (ESO). Since the controller design does not require exact information of system parameters, it is very robust against structural uncertainties of the drive axis. We simulate the controller on a vibrational piezoelectric beam gyroscope. The effectiveness of the controller is verified by the simulation results and performance analysis. {\textcopyright} 2007 IEEE.",

author = "Lili Dong and Qing Zheng and Zhiqiang Gao",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/ACC.2007.4282883",

language = "American English",

journal = "Proceedings of the American Control Conference",

}

TY - JOUR

T1 - A Novel Oscillation Controller for Vibrational MEMS Gyroscopes

AU - Dong, Lili

AU - Zheng, Qing

AU - Gao, Zhiqiang

PY - 2007/12/1

Y1 - 2007/12/1

N2 - This paper introduces a novel oscillation controller for the drive axis of a MEMS gyroscope. Assuming the resonant frequencies of the drive and sense axes are matched and no external control input for sense axis, we employ the controller to drive the drive axis to resonance, to regulate the output amplitude of drive axis to a desired value, and to compensate for the mechanical-thermal noise and Quadrature error term. The controller is simply a combination of a traditional PD controller and a linear Extended State Observer (ESO). Since the controller design does not require exact information of system parameters, it is very robust against structural uncertainties of the drive axis. We simulate the controller on a vibrational piezoelectric beam gyroscope. The effectiveness of the controller is verified by the simulation results and performance analysis. © 2007 IEEE.

AB - This paper introduces a novel oscillation controller for the drive axis of a MEMS gyroscope. Assuming the resonant frequencies of the drive and sense axes are matched and no external control input for sense axis, we employ the controller to drive the drive axis to resonance, to regulate the output amplitude of drive axis to a desired value, and to compensate for the mechanical-thermal noise and Quadrature error term. The controller is simply a combination of a traditional PD controller and a linear Extended State Observer (ESO). Since the controller design does not require exact information of system parameters, it is very robust against structural uncertainties of the drive axis. We simulate the controller on a vibrational piezoelectric beam gyroscope. The effectiveness of the controller is verified by the simulation results and performance analysis. © 2007 IEEE.

UR - https://engagedscholarship.csuohio.edu/enece_facpub/482

UR - https://ieeexplore.ieee.org/document/4282883

U2 - 10.1109/ACC.2007.4282883

DO - 10.1109/ACC.2007.4282883

M3 - Article

JO - Proceedings of the American Control Conference

JF - Proceedings of the American Control Conference

ER -

A Novel Oscillation Controller for Vibrational MEMS Gyroscopes

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