Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes

Qing Zheng; Lili Dong; Zhiqiang Gao

doi:10.1109/CCA.2007.4389216

Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes

Qing Zheng
, Lili Dong
, Zhiqiang Gao

IEEE
Cleveland State University

Research output: Contribution to journal › Article › peer-review

Abstract

There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, Quadrature errors, and parameter variations. A demodulation approach based on the estimated dynamics of the system by an extended state observer is proposed to estimate the rotation rate. The simulation results on a Z-axis MEMS gyroscope show that the controller is very effective by driving the output of the drive axis to a desired trajectory, forcing the vibration of the sense axis to zero for a force-to-rebalance operation and precisely estimating the rotation rate. © 2007 IEEE.

Original language	American English
Journal	Proceedings of the IEEE International Conference on Control Applications
DOIs	https://doi.org/10.1109/CCA.2007.4389216
State	Published - Dec 1 2007

Disciplines

Electrical and Computer Engineering

Access to Document

10.1109/CCA.2007.4389216License: CC BY

https://ieeexplore.ieee.org/document/4389216

Cite this

@article{d11bb60f66e4434cbe21f45dab178fea,

title = "Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes",

abstract = " There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, Quadrature errors, and parameter variations. A demodulation approach based on the estimated dynamics of the system by an extended state observer is proposed to estimate the rotation rate. The simulation results on a Z-axis MEMS gyroscope show that the controller is very effective by driving the output of the drive axis to a desired trajectory, forcing the vibration of the sense axis to zero for a force-to-rebalance operation and precisely estimating the rotation rate. {\textcopyright} 2007 IEEE.",

author = "Qing Zheng and Lili Dong and Zhiqiang Gao",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/CCA.2007.4389216",

language = "American English",

journal = "Proceedings of the IEEE International Conference on Control Applications",

}

TY - JOUR

T1 - Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes

AU - Zheng, Qing

AU - Dong, Lili

AU - Gao, Zhiqiang

PY - 2007/12/1

Y1 - 2007/12/1

N2 - There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, Quadrature errors, and parameter variations. A demodulation approach based on the estimated dynamics of the system by an extended state observer is proposed to estimate the rotation rate. The simulation results on a Z-axis MEMS gyroscope show that the controller is very effective by driving the output of the drive axis to a desired trajectory, forcing the vibration of the sense axis to zero for a force-to-rebalance operation and precisely estimating the rotation rate. © 2007 IEEE.

AB - There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, Quadrature errors, and parameter variations. A demodulation approach based on the estimated dynamics of the system by an extended state observer is proposed to estimate the rotation rate. The simulation results on a Z-axis MEMS gyroscope show that the controller is very effective by driving the output of the drive axis to a desired trajectory, forcing the vibration of the sense axis to zero for a force-to-rebalance operation and precisely estimating the rotation rate. © 2007 IEEE.

UR - https://engagedscholarship.csuohio.edu/enece_facpub/483

UR - https://ieeexplore.ieee.org/document/4389216

U2 - 10.1109/CCA.2007.4389216

DO - 10.1109/CCA.2007.4389216

M3 - Article

JO - Proceedings of the IEEE International Conference on Control Applications

JF - Proceedings of the IEEE International Conference on Control Applications

ER -

Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes

Abstract

Disciplines

Access to Document

Other files and links

Cite this